Microactuators - Principles , Applications , Trends
نویسنده
چکیده
With the aid of actuators energy fluxes and mass or volume flows can be controlled electrically. Microactuators distinguish themselves by dimensions in the range of millimetres and submillimetres. This paper describes the technologies prevailing today for the manufacturing of microactuators. A wealth of examples from the most different application fields clarify their application potential as stand-alone devices and in microelectromechanical systems (MEMS).
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